
6. Installation
41
6.5 Suctioning for Clean Room Application
Actuators designed for clean room application can demonstrate performance corresponding to cleanliness class
10 (0.1 Pm or more per 1 ft
3
) by suctioning air from the suction joint. The suction flow rate at the rated speed of
each model is shown in the table below.
Reference Suction Flow Rates
Type Thread lead
Suction flow rate
[NL/min]
4 15
8 30
ISDBCR-S
ISPDBCR-S
16 60
5 20
10 50
20 120
ISDBCR-M/MX
ISPDBCR-M/MX
30 180
10 50
20 120
ISDBCR-L/LX
ISPDBCR-L/LX
40 180
10 50
20 100
SSPDACR-S
30 150
10 60
20 110
SSPDACR-M
40 160
25 120
SSPDACR-L
50 180
x Suction air from the quick joint of 12 in outer diameter provided on the side face of the actuator. Connect an
air tube to this joint and suction air using a vacuum pump, ejector, etc. Suction equipment must be provided by
the customer.
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