
Table of Contents
Safety Guide..................................................................................................................................................1
Caution in Handling .......................................................................................................................................8
Names of the Parts........................................................................................................................................9
1. Specification Check..............................................................................................................................11
1.1 Checking the Product .................................................................................................................11
1.1.1 Parts ............................................................................................................................11
1.1.2 Related Operation Manuals for the Each Controller Supported by this Product .......... 11
1.1.3 How to Read the Model Nameplate.............................................................................11
1.1.4 How to Read the Model Number .................................................................................12
1.2 Specification ...............................................................................................................................13
1.2.1 Speed ..........................................................................................................................13
1.2.2 Maximum Acceleration and Transportable Weight.......................................................16
1.2.3 Driving System • Position Detector ..............................................................................36
1.2.4 Positioning Precision ...................................................................................................36
1.2.5 Current Limit Value and Pressing Force ......................................................................37
1.2.6 Allowable Load Moment of Actuator ............................................................................39
1.2.7 Duty Ratio in Continuous Operation ............................................................................40
1.3 Options .......................................................................................................................................41
1.3.1 Brake Type (Model No. : B) .........................................................................................41
1.3.2 Reversed-home Specification (Model No. : NM)..........................................................41
1.3.3 Motor Left Reversed, Motor Right Reversed (Model No. : ML, MR) ............................41
1.3.4 Vacuum Joint on Other Side (Model No. : VR) ............................................................41
1.4 Motor • Encoder Cables..............................................................................................................42
1.4.1 Motor • Encoder Integrated Cables..............................................................................42
1.4.2 Motor • Encoder Integrated Cables Robot Type ..........................................................43
2. Installation ............................................................................................................................................44
2.1 Transportation.............................................................................................................................44
2.2 Installation and Storage • Preservation Environment..................................................................46
2.3 Installation ..................................................................................................................................47
2.3.1 General Rules on Installation.......................................................................................47
2.3.2 Installation of Main Unit ...............................................................................................48
2.4 Clean-Room Type.......................................................................................................................54
2.4.1 Reference for Vacuuming Capacity .............................................................................54
2.4.2 Vacuum Joint ...............................................................................................................54
3. Connecting with Controller ...................................................................................................................55
4. Maintenance Inspection .......................................................................................................................59
4.1 Inspection Items and Schedule...................................................................................................59
4.2 External Visual Inspection ..........................................................................................................59
4.3 Cleaning .....................................................................................................................................59
4.4 Internal Inspections ....................................................................................................................60
4.5 Internal Cleaning ........................................................................................................................60
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